23.160 - Vacuum technology

This document specifies three methods for measuring the volume flow rate and one method each for measuring the base pressure, the compression ratio, and the critical backing pressure of a vacuum pump. The first method for measuring the volume flow rate (the throughput method) is the basic concept, in which a steady gas flow is injected into the pump while the inlet pressure is measured. In practice, the measurement of gas throughput may be complicated or inexact. For this reason, two other metho...view more

This document specifies methods for measuring the volume flow rate, base pressure, water vapour tolerance, power consumption, and the lowest start-up temperature of positive displacement vacuum pumps, which discharge gas against atmospheric pressure and with a usual base pressure In this document, it is necessary to use the determinations of volume flow rate and base pressure specified in ISO 21360‑1. This document also applies to the testing of other types of pumps which can discharge gas again...view more

This document gives definitions of vacuum pumps and related terms. It is a continuation of ISO 3529‑1 which defines general terms used in vacuum technology.

This document specifies the dimensions of the clamped-type quick-release couplings used in vacuum technology, as well as those of the O-rings and their carriers associated with these couplings, used to ensure vacuum tightness. NOTE The dimensions retained for the coupling diameter ensure the compatibility of the quick-release coupling with the corresponding vacuum flanges specified in ISO 1609[1].

This document specifies the dimensions of fixed or rotatable bolted knife-edge flanges used in vacuum systems for pressures ranging from atmospheric to as low as 10−11 Pa.

This document specifies the dimensions of non-knife-edge flanges and collars used in vacuum technology. The dimensions ensure interchangeability between bolted, clamped and rotatable flanges: a) whether the assembly be homogeneous (for example, bolted flanges or clamped flanges) or heterogeneous (for example, bolted flanges assembled with clamped flanges either by means of bolts or clamps or by means of bolts and rotatable flanges). b) whether the sealing rings used with the flanges be elastomer...view more

This document specifies mounting dimensions for vacuum pipeline fittings (elbows, tees and crosses) of knife-edge flanges for nominal bores from 16 mm to 200 mm.

This document specifies mounting dimensions for vacuum pipeline fittings (elbows, tees and crosses) of non knife-edge flange for nominal bores from 10 mm to 250 mm of the R5 series.

This document defines dimensions of right-angle valves that are compatible with the mounting dimensions of elbows defined in ISO 9803-1 and ISO 9803-2. This document covers right-angle valves with flanges defined in ISO 2861, ISO 1609 and ISO 3669.

This document defines general terms used in vacuum technology. It gives theoretical definitions as precise as possible, bearing in mind the need for use of the concept in practice.

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges. This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

This document specifies methods and special requirements for measuring the maximum tolerable pressure difference, effective compression ratio, compression ratio with zero throughput and overflow valve pressure difference of mechanical booster vacuum pumps. It applies to mechanical booster vacuum pumps employed for medium vacuum or rough vacuum applications including gas-cooled mechanical booster vacuum pump and multiple mechanical booster vacuum pump systems. It covers particular characteristics...view more

This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those — with mechanical or magnetic bearings; — with or without an additional drag stage(s) or other pumping stages on the shaft; — with one or more inlet ports. Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely d...view more

This document describes procedures to measure outgassing rates from components designed for vacuum chambers and of vacuum chambers as a whole. The outgassing rates are expected to be lower than 10−5 Pa m3 s−1 (10−2 Pa L s−1) at 23 °C and to emerge from devices that are suitable for high or ultra-high vacuum applications. The molecular mass of the outgassing species or vapour is below 300 u. The upper limit 10−5 Pa m3 s−1 of total outgassing rate is specified independent of the size, the total su...view more

This document describes procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic mass-to-charge ratios m/z This document is not applicable to QMSs with other ion sources, such as chemical ionization, photo-ionization or field ionization sources and for the measurements of higher m/z, which are mainly used to specify organic materials. It is well known from published investigations on the ...view more

ISO 19685:2017 identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges. ISO 19685:2017 applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa. ISO 19685:2017 complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards. In addition, ISO 19685:2017 defines procedures to characterize Pirani gauges for response time and hysteresi...view more

This standard gives requirements and the corresponding test/assessment methods applicable to leak detection kits (leak detector) based on the measurement of pressure change. Leak detection kits are intended to be used with double skin, underground or above ground, pressurized or non-pressurized, tanks or pipework designed for water polluting liquids/fluids. The kits are usually composed of:
- measuring device;
- evaluation device;
- alarm device;
- pressure generator;
- pressure relief devi...view more

ISO 3529-3:2014 gives definitions of total and partial pressure vacuum gauges. lt is a continuation of ISO 3529‑1, which defines general terms used in vacuum technology, and of ISO 3529‑2, which gives definitions of vacuum pumps and related terms.

This European Standard is applicable to process gas compressors and process gas compressor units having an operating pressure greater than 0,5 bar (gauge), an input shaft power greater than 0,5 kW and designed to compress all gases other than air, nitrogen or inert gases which are covered in Part 1. This document deals with all significant hazards, hazardous situations and events relevant to the design, installation, operation, maintenance, dismantling and disposal of process gas compressors and...view more

This European Standard is applicable to process gas compressors and process gas compressor units having an operating pressure greater than 0,5 bar (gauge), an input shaft power greater than 0,5 kW and designed to compress all gases other than air, nitrogen or inert gases which are covered in Part 1. This document deals with all significant hazards, hazardous situations and events relevant to the design, installation, operation, maintenance, dismantling and disposal of process gas compressors and...view more