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IEC 62047-33:2019

(Main)

Semiconductor devices - Micro-electromechanical devices - Part 33: MEMS piezoresistive pressure-sensitive device

Semiconductor devices - Micro-electromechanical devices - Part 33: MEMS piezoresistive pressure-sensitive device

IEC 62047-33:2019 (E) defines terms, definitions, essential ratings and characteristics, as well as test methods applicable to MEMS piezoresistive pressure-sensitive device. This document applies to piezoresistive pressure-sensitive devices for automotive, medical treatment, electronic products.

General Information

Status
Published
Publication Date
04-Apr-2019
ICS
01 - GENERALITIES. TERMINOLOGY. STANDARDIZATION. DOCUMENTATION
31.080.99 - Other semiconductor devices
31.140 - Piezoelectric devices
Technical Committee
SC 47F - Micro-electromechanical systems
Drafting Committee
WG 3 - TC 47/SC 47F/WG 3
Current Stage
PPUB - Publication issued
Start Date
26-Apr-2019
Completion Date
05-Apr-2019
Ref Project

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IEC 62047-33:2019 - Semiconductor devices - Micro-electromechanical devices - Part 33: MEMS piezoresistive pressure-sensitive deviceIEC 62047-33:2019 - Semiconductor devices - Micro-electromechanical devices - Part 33: MEMS piezoresistive pressure-sensitive device
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IEC 62047-33:2019 - Semiconductor devices - Micro-electromechanical devices - Part 33: MEMS piezoresistive pressure-sensitive device
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IEC 62047-33
®

Edition 1.0 2019-04
INTERNATIONAL
STANDARD



Semiconductor devices – Micro-electromechanical devices –
Part 33: MEMS piezoresistive pressure-sensitive device

IEC 62047-33:2019-04(en)

---------------------- Page: 1 ----------------------
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IEC 62047-33

®


Edition 1.0 2019-04




INTERNATIONAL



STANDARD



















Semiconductor devices – Micro-electromechanical devices –

Part 33: MEMS piezoresistive pressure-sensitive device



























INTERNATIONAL

ELECTROTECHNICAL


COMMISSION





ICS 31.080.99; 31.140 ISBN 978-2-8322-6718-9




  Warning! Make sure that you obtained this publication from an authorized distributor.


® Registered trademark of the International Electrotechnical Commission

---------------------- Page: 3 ----------------------
– 2 – IEC 62047-33:2019 © IEC 2019
CONTENTS
FOREWORD . 4
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 7
4 Essential ratings and characteristics . 8
4.1 Ratings (Limiting values) . 8
4.2 Recommended operating conditions . 8
4.3 Characteristics . 8
5 Test methods . 9
5.1 Input resistance . 9
5.2 Output resistance . 9
5.3 Leakage current . 9
5.3.1 P-N junction iso
...

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