ISO 21859:2019

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.

Céramiques techniques — Méthode d’essai pour déterminer la résistance au plasma des composants céramiques dans les équipements de production à semi-conducteurs

General Information

• Status: Published
• Publication Date: 17-Jun-2019
• ICS: 81.060.30 - Advanced ceramics
• Technical Committee: ISO/TC 206 - Fine ceramics
• Drafting Committee: ISO/TC 206/WG 12 - Engineering applications
• Current Stage: 6060 - International Standard published
• Start Date: 13-Oct-2019
• Due Date: 14-Oct-2019
• Completion Date: 18-Jun-2019

Standards Content (Sample)

INTERNATIONAL ISO
STANDARD 21859
First edition
2019-06
Fine ceramics (advanced ceramics,
advanced technical ceramics) — Test
method for plasma resistance of
ceramic components in semiconductor
manufacturing equipment
Céramiques techniques — Méthode d’essai pour déterminer
la résistance au plasma des composants céramiques dans les
équipements de production à semi-conducteurs
Reference number
ISO 21859:2019(E)
©
ISO 2019

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ISO 21859:2019(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2019
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ii © ISO 2019 – All rights reserved

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ISO 21859:2019(E)

Contents Page
Foreword .iv
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Principle of measurement . 1
5 Test environment . 2
6 Apparatus . 2
7 Test pieces . 2
7.1 General consideration . 2
7.2 Surface conditions . 2
8 Procedure. 2
8.1 Measurement of surface roughness before a plasma resistance test . 2
8.2 Masking . 3
8.3 Plasma resistance test . 3
8.3.1 Setting of test pieces . 3
8.3.2 Test conditions. 3
8.4 Measurement of erosion depth . 3
8.5 Measurement of surface roughness after the plasma resistance test . 3
9 Calculation . 3
9.1 Calculation of mean erosion depth . 3
9.2 Calculation of surface roughness . 4
10 Test report . 4
© ISO 2019 – All rights reserved iii

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ISO 21859:2019(E)

Foreword
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This document was prepared by Technical Committee ISO/TC 206, Fine ceramics.
Any feedback or questions on this document should be directed to the user’s national standards body. A
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