Semiconductor devices - Mechanical and climatic test methods - Part 26: Electrostatic discharge (ESD) sensitivity testing - Human body model (HBM) (IEC 60749-26:2018)

This part of IEC 60749 establishes the procedure for testing, evaluating, and classifying
components and microcircuits according to their susceptibility (sensitivity) to damage or
degradation by exposure to a defined human body model (HBM) electrostatic discharge (ESD).
The purpose of this document is to establish a test method that will replicate HBM failures and
provide reliable, repeatable HBM ESD test results from tester to tester, regardless of
component type. Repeatable data will allow accurate classifications and comparisons of HBM
ESD sensitivity levels.
ESD testing of semiconductor devices is selected from this test method, the machine model
(MM) test method (see IEC 60749-27) or other ESD test methods in the IEC 60749 series.
Unless otherwise specified, this test method is the one selected.

Halbleiterbauelemente - Mechanische und klimatische Prüfverfahren - Teil 26: Prüfung der Empfindlichkeit gegen elektrostatische Entladungen (ESD) - Human Body Model (HBM) (IEC 60749-26:2018)

Dispositifs à semiconducteurs - Méthodes d'essais mécaniques et climatiques - Partie 26: Essai de sensibilité aux décharges électrostatiques (DES) - Modèle du corps humain (HBM) (IEC 60749-26:2018)

L'IEC 60749-26:2018 établit une procédure pour les essais, l'évaluation et la classification des composants et des microcircuits en fonction de leur susceptibilité (sensibilité) aux dommages ou de leur dégradation à la suite de leur exposition à des décharges électrostatiques (DES) sur un modèle de corps humain (HBM) défini.
Le but du présent document est de déterminer une méthode d'essai permettant de reproduire les défaillances du HBM et de fournir des résultats d'essais de DES de HBM fiables et reproductibles d'un appareil d'essai à un autre, sans tenir compte du type de composant. Des données reproductibles autoriseront des classifications et des comparaisons précises des niveaux de sensibilité de DES de HBM.
Les essais de DES des dispositifs à semiconducteurs sont choisis entre la présente méthode d'essai, celle du modèle de machine (MM) (voir IEC 60749-27) ou toute autre méthode d'essai de la série IEC 60749. Sauf indication contraire, la présente méthode d'essai est celle qui prévaut.
Cette quatrième édition annule et remplace la troisième édition parue en 2013. Cette édition constitue une révision technique. La présente norme se base sur l'ANSI/ESDA/JEDEC JS-001-2014. Elle est utilisée avec l'autorisation des détenteurs des droits d'auteur, ESD Association et JEDEC Solid state Technology Association.
Cette édition inclut les modifications techniques majeures suivantes par rapport à l'édition précédente:
a)   un nouveau paragraphe sur la contrainte de HBM avec un simulateur à faibles parasites est ajouté, ainsi qu'un essai visant à déterminer si un simulateur de HBM est un simulateur à faibles parasites;
b)   un nouvel article est ajouté pour les broches clonées n'assurant pas l'alimentation et une nouvelle annexe est ajoutée pour les essais des broches clonées n'assurant pas l'alimentation.

Polprevodniški elementi - Metode za mehansko in klimatsko preskušanje - 26. del: Preskušanje občutljivosti na elektrostatično razelektritev (ESD) - Model človeškega telesa (HBM) (IEC 60749-26:2018)

Ta del standarda IEC 60749 določa standardni postopek za preskušanje, ocenjevanje in razvrščanje sestavnih delov in mikrovezij glede na občutljivost na poškodbe in degradacijo, ki so posledica izpostavljenosti določenim elektrostatičnim izpraznitvam (ESD) modela človeškega telesa (HBM).
Namen tega dokumenta je določiti preskusno metodo, ki bo ponovila napake modela človeškega telesa ter zagotovila zanesljive in ponovljive preskusne rezultate elektrostatičnih izpraznitev modela človeškega telesa pri vseh preskuševalcih ne glede na vrsto sestavnega dela. Ponovljivi podatki bodo omogočili natančne opredelitve in primerjave ravni občutljivosti na elektrostatične izpraznitve (ESD) modela človeškega telesa (HBM).
Preskus elektrostatične izpraznitve elementov se izbere iz te preskusne metode, preskusne metode modela stroja (MM; glej standard IEC 60749-27) ali drugih testnih metod iz serije standardov IEC 60749.
Če ni navedeno drugače, je treba izbrati to preskusno metodo.

General Information

Status
Published
Publication Date
15-Apr-2018
Technical Committee
Current Stage
6060 - National Implementation/Publication (Adopted Project)
Start Date
28-Mar-2018
Due Date
02-Jun-2018
Completion Date
16-Apr-2018

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SLOVENSKI STANDARD
SIST EN IEC 60749-26:2018
01-maj-2018
1DGRPHãþD
SIST EN 60749-26:2014
3ROSUHYRGQLãNLHOHPHQWL0HWRGH]DPHKDQVNRLQNOLPDWVNRSUHVNXãDQMHGHO
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Semiconductor devices - Mechanical and climatic test methods - Part 26: Electrostatic
discharge (ESD) sensitivity testing - Human body model (HBM) (IEC 60749-26:2018)
Halbleiterbauelemente - Mechanische und klimatische Prüfverfahren - Teil 26: Prüfung
der Empfindlichkeit gegen elektrostatische Entladungen (ESD) - Human Body Model
(HBM) (IEC 60749-26:2018)
Dispositifs à semiconducteurs - Méthodes d'essais mécaniques et climatiques - Partie
26: Essai de sensibilité aux décharges électrostatiques (DES) - Modèle du corps humain
(HBM) (IEC 60749-26:2018)
Ta slovenski standard je istoveten z: EN IEC 60749-26:2018
ICS:
31.080.01 Polprevodniški elementi Semiconductor devices in
(naprave) na splošno general
SIST EN IEC 60749-26:2018 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN IEC 60749-26:2018

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SIST EN IEC 60749-26:2018


EUROPEAN STANDARD EN IEC 60749-26

NORME EUROPÉENNE

EUROPÄISCHE NORM
March 2018
ICS 31.080.01 Supersedes EN 60749-26:2014
English Version
Semiconductor devices - Mechanical and climatic test methods -
Part 26: Electrostatic discharge (ESD) sensitivity testing -
Human body model (HBM)
(IEC 60749-26:2018)
Dispositifs à semiconducteurs - Méthodes d'essais Halbleiterbauelemente - Mechanische und klimatische
mécaniques et climatiques - Partie 26: Essai de sensibilité Prüfverfahren - Teil 26: Prüfung der Empfindlichkeit gegen
aux décharges électrostatiques (DES) - Modèle du corps elektrostatische Entladungen (ESD) - Human Body Model
humain (HBM) (HBM)
(IEC 60749-26:2018) (IEC 60749-26:2018)
This European Standard was approved by CENELEC on 2018-02-19. CENELEC members are bound to comply with the CEN/CENELEC
Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration.
Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC
Management Centre or to any CENELEC member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CENELEC member into its own language and notified to the CEN-CENELEC Management Centre has the
same status as the official versions.
CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic,
Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia,
Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden,
Switzerland, Turkey and the United Kingdom.


European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2018 CENELEC All rights of exploitation in any form and by any means reserved worldwide for CENELEC Members.
 Ref. No. EN IEC 60749-26:2018 E

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SIST EN IEC 60749-26:2018
EN IEC 60749-26:2018 (E)
European foreword
The text of document 47/2438/FDIS, future edition 4 of IEC 60749-26, prepared by IEC/TC 47
"Semiconductor devices" was submitted to the IEC-CENELEC parallel vote and approved by
CENELEC as EN IEC 60749-26:2018.

The following dates are fixed:
(dop) 2018-11-19
• latest date by which the document has to be
implemented at national level by
publication of an identical national
standard or by endorsement
• latest date by which the national (dow) 2021-02-19
standards conflicting with the
document have to be withdrawn

This document supersedes EN 60749-26:2014.

Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CENELEC shall not be held responsible for identifying any or all such patent rights.

Endorsement notice
The text of the International Standard IEC 60749-26:2018 was approved by CENELEC as a European
Standard without any modification.
In the official version, for Bibliography, the following notes have to be added for the standards indicated:

IEC 60749 (series) NOTE Harmonized as EN 60749 (series).
IEC 60749-27 NOTE Harmonized as EN 60749-27.


2

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SIST EN IEC 60749-26:2018




IEC 60749-26

®


Edition 4.0 2018-01




INTERNATIONAL



STANDARD




NORME



INTERNATIONALE
colour

inside










Semiconductor devices – Mechanical and climatic test methods –

Part 26: Electrostatic discharge (ESD) sensitivity testing – Human body model

(HBM)



Dispositifs à semiconducteurs – Méthodes d'essais mécaniques et climatiques –

Partie 26: Essai de sensibilité aux décharges électrostatiques (DES) – Modèle du


corps humain (HBM)












INTERNATIONAL

ELECTROTECHNICAL

COMMISSION


COMMISSION

ELECTROTECHNIQUE


INTERNATIONALE




ICS 31.080.01 ISBN 978-2-8322-5256-7



Warning! Make sure that you obtained this publication from an authorized distributor.

Attention! Veuillez vous assurer que vous avez obtenu cette publication via un distributeur agréé.

® Registered trademark of the International Electrotechnical Commission
Marque déposée de la Commission Electrotechnique Internationale

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SIST EN IEC 60749-26:2018
– 2 – IEC 60749-26:2018 © IEC 2018
CONTENTS
FOREWORD . 5
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
4 Apparatus and required equipment . 10
4.1 Waveform verification equipment . 10
4.2 Oscilloscope . 11
4.3 Additional requirements for digital oscilloscopes . 11
4.4 Current transducer (inductive current probe) . 11
4.5 Evaluation loads . 11
4.6 Human body model simulator . 12
4.7 HBM test equipment parasitic properties . 12
5 Stress test equipment qualification and routine verification . 12
5.1 Overview of required HBM tester evaluations . 12
5.2 Measurement procedures . 13
5.2.1 Reference pin pair determination . 13
5.2.2 Waveform capture with current probe . 13
5.2.3 Determination of waveform parameters . 14
5.2.4 High voltage discharge path test . 17
5.3 HBM tester qualification . 17
5.3.1 HBM ESD tester qualification requirements . 17
5.3.2 HBM tester qualification procedure . 17
5.4 Test fixture board qualification for socketed testers . 18
5.5 Routine waveform check requirements . 19
5.5.1 Standard routine waveform check description . 19
5.5.2 Waveform check frequency . 19
5.5.3 Alternate routine waveform capture procedure . 20
5.6 High voltage discharge path check . 20
5.6.1 Relay testers . 20
5.6.2 Non-relay testers . 20
5.7 Tester waveform records. 20
5.7.1 Tester and test fixture board qualification records . 20
5.7.2 Periodic waveform check records . 20
5.8 Safety . 21
5.8.1 Initial set-up . 21
5.8.2 Training . 21
5.8.3 Personnel safety . 21
6 Classification procedure . 21
6.1 Devices for classification . 21
6.2 Parametric and functional testing . 21
6.3 Device stressing . 21
6.4 Pin categorization . 22
6.4.1 General . 22
6.4.2 No connect pins . 22
6.4.3 Supply pins . 23
6.4.4 Non-supply pins . 23

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SIST EN IEC 60749-26:2018
IEC 60749-26:2018 © IEC 2018 – 3 –
6.5 Pin groupings . 24
6.5.1 Supply pin groups . 24
6.5.2 Shorted non-supply pin groups . 24
6.6 Pin stress combinations . 24
6.6.1 Pin stress combination categorization . 24
6.6.2 Non-supply and supply to supply combinations (1, 2, … N) . 26
6.6.3 Non-supply to non-supply combinations . 27
6.7 HBM stressing with a low-parasitic simulator . 28
6.7.1 Low-parasitic HBM simulator . 28
6.7.2 Requirements for low parasitics . 28
6.8 Testing after stressing . 28
7 Failure criteria . 28
8 Component classification . 28
Annex A (informative) HBM test method flow chart . 30
Annex B (informative) HBM test equipment parasitic properties . 33
B.1 Optional trailing pulse detection equipment / apparatus . 33
B.2 Optional pre-pulse voltage rise test equipment . 34
B.3 Open-relay tester capacitance parasitics . 36
B.4 Test to determine if an HBM simulator is a low-parasitic simulator . 36
Annex C (informative) Example of testing a product using Table 2, Table 3, or Table 2
with a two-pin HBM tester . 38
C.1 General . 38
C.2 Procedure A (following Table 2): . 39
C.3 Alternative procedure B (following Table 3): . 40
C.4 Alternative procedure C (following Table 2): . 41
Annex D (informative) Examples of coupled non-supply pin pairs . 43
Annex E (normative) Cloned non-supply (I/O) pin sampling test method . 44
E.1 Purpose and overview . 44
E.2 Pin sampling overview and statistical details . 44
E.3 IC product selections . 45
E.4 Randomly selecting and testing cloned I/O pins . 46
E.5 Determining if sampling can be used with the supplied Excel spreadsheet . 46
E.5.1 Using the supplied Excel spreadsheet . 46
E.5.2 Without using the Excel spreadsheet . 46
E.6 HBM testing with a sample of cloned I/O pins . 46
E.7 Examples of testing with sampled cloned I/Os . 47
Bibliography . 50

Figure 1 – Simplified HBM simulator circuit with loads . 12
Figure 2 – Current waveform through shorting wires . 15
Figure 3 – Current waveform through a 500 Ω resistor . 16
Figure 4 – Peak current short circuit ringing waveform . 17
Figure A.1 – HBM test method flow chart (1 of 3) . 30
Figure B.1 – Diagram of trailing pulse measurement setup. 33
Figure B.2 – Positive stress at 4 000 V . 34
Figure B.3 – Negative stress at 4 000 V . 34

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SIST EN IEC 60749-26:2018
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Figure B.4 – Illustration of measuring voltage before HBM pulse with a Zener diode or
a device . 35
Figure B.5 – Example of voltage rise before the HBM current pulse across a 9,4 V
Zener diode . 35
Figure B.6 – Diagram of a 10-pin shorting test device showing current probe . 37
Figure C.1 – Example to demonstrate the idea of the partitioned test . 38
Figure E.1 – SPL, V1, VM, and z with the Bell shape distribution pin failure curve . 45
Figure E.2 – I/O sampling test method flow chart . 49

Table 1 – Waveform specification . 19
Table 2 – Preferred pin combinations sets . 25
Table 3 – Alternative pin combinations sets . 26
Table 4 – HBM ESD component classification levels . 29
Table C.1 – Product testing in accordance with Table 2 . 40
Table C.2 – Product testing in accordance with Table 3 . 41
Table C.3 – Alternative product testing in accordance with Table 2 . 42

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SIST EN IEC 60749-26:2018
IEC 60749-26:2018 © IEC 2018 – 5 –
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________

SEMICONDUCTOR DEVICES –
MECHANICAL AND CLIMATIC TEST METHODS –

Part 26: Electrostatic discharge (ESD) sensitivity testing –
Human body model (HBM)

FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 60749-26 has been prepared by IEC technical committee 47:
Semiconductor devices in collaboration with technical committee 101: Electrostatics.
This fourth edition cancels and replaces the third edition published in 2013. This edition
constitutes a technical revision. This standard is based upon ANSI/ESDA/JEDEC JS-001-
2014. It is used with permission of the copyright holders, ESD Association and JEDEC Solid
state Technology Association.
This edition includes the following significant technical changes with respect to the previous
edition:
a) a new subclause relating to HBM stressing with a low parasitic simulator is added,
together with a test to determine if an HBM simulator is a low parasitic simulator;

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SIST EN IEC 60749-26:2018
– 6 – IEC 60749-26:2018 © IEC 2018
b) a new subclause is added for cloned non-supply pins and a new annex is added for
testing cloned non-supply pins.
The text of this International Standard is based on the following documents:
FDIS Report on voting
47/2438/FDIS 47/2454/RVD

Full information on the voting for the approval of this International Standard can be found in
the report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.
A list of all parts in the IEC 60749 series, published under the general title Semiconductor
devices – Mechanical and climatic test methods, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to
the specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.

IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates
that it contains colours which are considered to be useful for the correct
understanding of its contents. Users should therefore print this document using a
colour printer.

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SIST EN IEC 60749-26:2018
IEC 60749-26:2018 © IEC 2018 – 7 –
SEMICONDUCTOR DEVICES –
MECHANICAL AND CLIMATIC TEST METHODS –

Part 26: Electrostatic discharge (ESD) sensitivity testing –
Human body model (HBM)



1 Scope
This part of IEC 60749 establishes the procedure for testing, evaluating, and classifying
components and microcircuits according to their susceptibility (sensitivity) to damage or
degradation by exposure to a defined human body model (HBM) electrostatic discharge (ESD).
The purpose of this document is to establish a test method that will replicate HBM failures and
provide reliable, repeatable HBM ESD test results from tester to tester, regardless of
component type. Repeatable data will allow accurate classifications and comparisons of HBM
ESD sensitivity levels.
ESD testing of semiconductor devices is selected from this test method, the machine model
(MM) test method (see IEC 60749-27) or other ESD test methods in the IEC 60749 series.
Unless otherwise specified, this test method is the one selected.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their
content constitutes requirements of this document. For dated references, only the edition
cited applies. For undated references, the latest edition of the referenced document (including
any amendments) applies.
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
ISO and IEC maintain terminological databases for use in standardization at the following
addresses:
• IEC Electropedia: available at http://www.electropedia.org/
• ISO Online browsing platform: available at http://www.iso.org/obp
3.1
associated non-supply pin
non-supply pin (typically an I/O pin) associated with a supply pin group
Note 1 to entry A non-supply pin is considered to be associated with a supply pin group if either:
a) the current from the supply pin group (i.e., VDDIO) is required for the function of the electrical circuit(s)
(I/O driver) that connect(s) (high/low impedance) to that non-supply pin;
b) a parasitic path exists between non-supply and supply pin group (e.g., open-drain type non-supply pin to a
VCC supply pin group that connects to a nearby N-well guard ring).

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– 8 – IEC 60749-26:2018 © IEC 2018
3.2
cloned non-supply (I/O) pin
set of input, output or bidirectional pins using the same I/O cell and electrical schematic and
sharing the same associated supply pin group(s) including ESD power clamp(s)
3.3
component
item such as a resistor, diode, transistor, integrated circuit or hybrid circuit
3.4
component failure
condition in which a tested component does not meet one or more specified static or dynamic
data sheet parameters
3.5
coupled non-supply pin pair
two pins that have an intended direct current path (such as a pass gate or resistors, such as
differential amplifier inputs, or low voltage differential signalling (LVDS) pins), including
analogue and digital differential pairs and other special function pairs (e.g., D+/D-,
XTALin/XTALout, RFin/RFout, TxP/TxN, RxP/RxN, CCP_DP/CCN_DN, etc.)
3.6
data sheet parameters
static and dynamic component performance data supplied by the component manufacturer or
supplier
3.7
withstand voltage
highest voltage level that does not cause device failure
Note 1 to entry: The device passes all tested lower voltages (see failure window).
3.8
failure window
intermediate range of stress voltages that can induce failure in a particular device type, when
the device type can pass some stress voltages both higher and lower than this range
Note 1 to entry: A component with a failure window can pass a 500 V test, fail a 1 000 V test and pass a 2 000 V
test. The withstand voltage of such a device is 500 V.
3.9
human body model electrostatic discharge
HBM ESD
ESD event meeting the waveform criteria specified in this document, approximating the
discharge from the fingertip of a typical human being to a grounded device
3.10
HBM ESD tester
HBM simulator
equipment that applies an HBM ESD to a component
3.11
I
ps
peak current value determined by the current at time t on the linear extrapolation of the
max
exponential current decay curve, based on the current waveform data over a 40 nanosecond

period beginning at t
max
SEE: Figure 2 a).

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SIST EN IEC 60749-26:2018
IEC 60749-26:2018 © IEC 2018 – 9 –
3.12
I
psmax
highest current value measured including the overshoot or ringing components due to internal
test simulator RLC parasitics
SEE: Figure 2 a).
3.13
no connect pin
package interconnection that is not electrically connected to a die
EXAMPLE: Pin, bump, ball interconnection.
Note 1 to entry: There are some pins which are labelled as no connect, which are actually connected to the die
and should not be classified as a no connect pin.
3.14
non-socketed tester
HBM simulator that makes contact to the device under test (DUT) pins (or balls, lands, bumps
or die pads) with test probes rather than placing the DUT in a socket
3.15
non-supply pin
pin that is not categorized as a supply pin or no connect
Note 1 to entry This includes pins such as input, output, offset adjusts, compensation, clocks, controls, address,
data, Vref pins and VPP pins on EPROM memory. Most non-supply pins transmit or receive
...

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