EN 60204-33:2011

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

Sicherheit von Maschinen - Elektrische Ausrüstungen von Maschinen - Teil 33: Anforderungen an Fertigungseinrichtungen für Halbleiter

Sécurité des machines - Equipement électrique des machines - Partie 33: Exigences pour les équipements de fabrication des semi-conducteurs

La CEI 60204-33:2009 s'applique aux équipements électriques et électroniques associés aux équipements de fabrication des semi-conducteurs pour la fabrication, les mesures, l'assemblage et les essais des semi-conducteurs. Elle s'applique aux équipements ou parties d'équipement électrique qui sont alimentés sous une tension d'alimentation nominale n'excédant pas 1 000 V en courant alternatif (c.a.) ou 1 500 V en courant continu (c.c.) et pour des fréquences nominales d'alimentation n'excédant pas 200 Hz. Pour des tensions ou des fréquences supérieures, des exigences particulières peuvent être nécessaires.

Varnost strojev - Električna oprema strojev - 33. del: Zahteve za opremo za izdelovanje polprevodnikov (IEC 60204-33:2009, spremenjen)

Ta del IEC 60204 velja za električno in elektronsko opremo, povezano z opremo za izdelovanje polprevodnikov, ki se uporablja za proizvodnjo, merjenje, sestavljanje in preskušanje polprevodnikov.
OPOMBA 1: V tem standardu izraz električni vključuje električne, elektronske in programirljive elektronske predmete (tj. električna oprema pomeni električno, elektronsko in programirljivo elektronsko opremo).
OPOMBA 2: V okviru tega standarda se izraz oseba nanaša na vse posameznike in vključuje tiste osebe, ki jih uporabnik ali njegov(-i) zastopnik(-i) določijo in usposobijo za namestitev in uporabo zadevne opreme za izdelavo ter za skrb zanjo.
Električna oprema, ki jo zajema ta standard, se začne na točki povezave napajanja z električno opremo (glej točko 5.1) in vključuje ustrezna navodila za varno namestitev.
OPOMBA 3: Za zahteve za električne inštalacije za napajanje v stavbah glej serijo IEC 60364.
Ta del velja za električno opremo ali dele električne opreme, ki obratujejo z nazivno napajalno napetostjo, ki ne presega 1000 V za izmenični tok (a.c.) in 1500 V za enosmerni tok (d.c.), in z nazivnimi frekvencami napajanja, ki ne presegajo 200 Hz. Za višje napetosti ali frekvence so morda potrebne posebne zahteve.
OPOMBA 4: Ta standard zajema tudi električno opremo, v kateri izpeljane napetosti presegajo navedene meje napajalne napetosti.
Vključene so zahteve za zaščitne ukrepe proti električnim nevarnostim in za električna zaporna vezja, ki ščitijo pred neelektričnimi nevarnostmi. Ne zajema pa vseh zahtev, ki so potrebne ali jih zahtevajo drugi standardi ali predpisi za zaščito oseb pred drugimi nevarnostmi, razen električnih (npr. kemičnimi nevarnostmi, mehanskimi nevarnostmi, nevarnostmi sevanja). Pri vsaki vrsti stroja je za zagotavljanje ustrezne varnosti treba upoštevati edinstvene zahteve.
Dodatne in posebne zahteve lahko veljajo za električno opremo za izdelovanje, ki:
 uporablja, obdeluje ali proizvaja potencialno eksploziven material;
 se uporablja v potencialno eksplozivni in/ali vnetljivi atmosferi;
 je posebej tvegana pri proizvodnji ali uporabi nekaterih materialov;
 so dvižni stroji (ki jih zajema IEC 60204-32).
Ta standard ne vključuje specifikacij za delovanje ali funkcijske značilnosti opreme za izdelovanje.
Ta standard ne obravnava morebitnih učinkov na človeško zdravje, do katerih lahko pride zaradi emisij (na primer elektromagnetnih polj, hrupa) iz opreme za izdelovanje.
Ta standard ne določa zahtev za elektromagnetno skladnost (EMC).

General Information

• Status: Published
• Publication Date: 03-Mar-2011
• Withdrawal Date: 27-Feb-2014
• ICS: 13.110 - Safety of machinery
• ICS: 25.040.30 - Industrial robots. Manipulators
• ICS: 29.020 - Electrical engineering in general
• Technical Committee: CLC/TC 44X - Safety of machinery: electrotchnical aspects
• Drafting Committee: IEC/TC 44 - IEC_TC_44
• Parallel Committee: IEC/TC 44 - IEC_TC_44
• Current Stage: 6060 - Document made available - Publishing
• Start Date: 04-Mar-2011
• Completion Date: 04-Mar-2011
• Directive: 2006/42/EC - Directive 2006/42/EC of the European Parliament and of the Council of 17 May 2006 on machinery, and amending Directive 95/16/EC (recast)
• Directive: 98/37/EC - Machinery
• Mandate: M/396 - Mandate to CEN and Cenelec for standardisation in the field of machinery
• Ref Project: SIST EN 60204-33:2011 - Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment (IEC 60204-33:2009, modified)

Standards Content (Sample)

SLOVENSKI STANDARD
SIST EN 60204-33:2011
01-maj-2011
9DUQRVWVWURMHY(OHNWULþQDRSUHPDVWURMHYGHO=DKWHYH]DRSUHPR]D
L]GHORYDQMHSROSUHYRGQLNRY,(&VSUHPHQMHQ
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for
semiconductor fabrication equipment (IEC 60204-33:2009, modified)
Sicherheit von Maschinen - Elektrische Ausrüstungen von Maschinen - Teil 33:
Anforderungen an Fertigungsausrüstungen für Halbleiter (IEC 60204-33:2009,
modifiziert)
Sécurité des machines - Equipement électrique des machines - Partie 33: Exigences
pour les equipments de fabrication des semi-conducteurs (CEI 60204-33:2009, modifiée)
Ta slovenski standard je istoveten z: EN 60204-33:2011
ICS:
13.110 Varnost strojev Safety of machinery
31.080.01 Polprevodniški elementi Semiconductor devices in
(naprave) na splošno general
SIST EN 60204-33:2011 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

---------------------- Page: 1 ----------------------

SIST EN 60204-33:2011

---------------------- Page: 2 ----------------------

SIST EN 60204-33:2011

EUROPEAN STANDARD
EN 60204-33

NORME EUROPÉENNE
March 2011
EUROPÄISCHE NORM

ICS 13.110; 25.040.30; 29.020


English version


Safety of machinery -
Electrical equipment of machines -
Part 33: Requirements for semiconductor fabrication equipment
(IEC 60204-33:2009, modified)


Sécurité des machines -  Sicherheit von Maschinen -
Equipement électrique des machines - Elektrische Ausrüstungen
Partie 33: Exigences pour les von Maschinen -
équipements de fabrication des semi- Teil 33: Anforderungen an
conducteurs Fertigungsausrüstungen für Halbleiter
(CEI 60204-33:2009, modifiée) (IEC 60204-33:2009, modifiziert)




This European Standard was approved by CENELEC on 2011-02-28. CENELEC members are bound to comply
with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard
the status of a national standard without any alteration.

Up-to-date lists and bibliographical references concerning such national standards may be obtained on
application to the Central Secretariat or to any CENELEC member.

This European Standard exists in three official versions (English, French, German). A version in any other
language made by translation under the responsibility of a CENELEC member into its own language and notified
to the Central Secretariat has the same status as the official versions.

CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus,
the Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy,
Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia,
Spain, Sweden, Switzerland and the United Kingdom.

CENELEC
European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung

Management Centre: Avenue Marnix 17, B - 1000 Brussels


© 2011 CENELEC - All rights of exploitation in any form and by any means reserved worldwide for CENELEC members.
Ref. No. EN 60204-33:2011 E

---------------------- Page: 3 ----------------------

SIST EN 60204-33:2011
EN 60204-33:2011 – 2 –
Foreword

The text of the International Standard IEC 60204-33:2009, prepared by IEC TC 44, Safety of
machinery - Electrotechnical aspects, together with common modifications prepared by the Technical
Committee CENELEC TC 44X, Safety of machinery: electrotechnical aspects, was submitted to the
formal vote and was approved by CENELEC as EN 60204-33 on 2011-02-28.
The following dates were fixed:

– latest date by which the EN has to be implemented
at national level by publication of an identical
national standard or by endorsement (dop) 2012-02-28

– latest date by which the national standards conflicting
with the EN have to be withdrawn (dow) 2014-02-28

This European Standard has been prepared under Mandate M/396 given to CENELEC by the
European Commission and the European Free Trade Association and covers essential requirements
of EC Directive 2006/42/EC. See Annex ZZ.

Annexes ZA and ZZ have been added by CENELEC.

__________

Endorsement notice
The text of the International Standard IEC 60204-33:2009 was approved by CENELEC as a European
Standard with agreed common modifications as given below.

COMMON MODIFICATIONS


4 General requirements
4.2 Selection of electrical equipment
Replace with:
4.2 Selection of electrical equipment
Electrical components and devices that are used as part of a safety related system and those that
handle hazardous voltage or hazardous electrical power shall be suitable for their intended use, be
applied in accordance with their supplier’s instructions and conform to relevant IEC sta
...